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      4. Ensure V30, V35, V9a, V21a, V11A, V14, SV03, REGX are open and V14 close, V14 are open 

      5. Open VHSV and the rotatable valve on the top of the line

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1. Close MV103
2. Purge from MV101
3. Connect a oil pump to the buffer tank
4. Connect He bottle to Helium purge Inlet
5. Open the He bottle to 10 psig
6. Open the valve on the buffer tank and start vaccum
7. Monitor the pressure on the buffer tank and let it go up to ~ 0.2 psi
8. Close Vfill and pump the lines and monitor the buffer tank pressure to go up to 0.2 psig
9. Pump back the lines by opening Vfill and monitor the buffer tank pressure to go up to ~ 10 psi
10. Do the pump and purging for 3 cycles

Steps for pump and purge:

1. Close the hand valve from the pump
2. Set the He gas cylinder to 10 psig
3. Open VFill slightly
4. Open the yellow color hand valve L7B while watching the gauge
5. Once it's pressuresized (check pressure from the pump) close Vfill and L7B
6. Close VBTv on the buffer tank
7. Disconnect the line from the pump and connect to the purity meter
8. Crack open VBTv and check the purity
9. Open L7B and disconnect the purity meter